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How Semiconductor Foundries Qualify a New Process for Customer Chips

Foundries qualify manufacturing processes through defined release criteria, reliability testing on qualification silicon, application-focused evaluation, and documented controls after release.
From TheFinanceBase Team4 min to read
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A foundry qualifies a new manufacturing process by setting release criteria, testing qualification silicon for reliability weaknesses, evaluating performance against intended application demands, and documenting whether the evidence meets agreed requirements. The work continues after release: statistical process control and formal change management help keep production within the qualified baseline. There is no universal test list, pass/fail threshold, yield target, or timeline that applies to every process.

What process qualification establishes

Process qualification is evidence that a manufacturing technology is reliable enough for its intended use and can be transferred into controlled manufacturing. It evaluates the technology and manufacturing process, not every possible chip that might be made with it.

JEDEC JEP001-3B describes methods and data for technology qualification vehicles (TQVs), but it does not set universal pass/fail values. Requirements beyond the guideline are determined in light of expected technology performance and the needs agreed between foundry and customer. TSMC describes its own approach as a qualification procedure that precedes transfer of a new technology to fabs, with release criteria and deliverables forming part of its technology development lifecycle.

How a foundry qualifies a process

  1. Define the scope and release criteria

    The foundry identifies the process being qualified, its intended applications, relevant process characteristics, and the evidence needed for release. Customer requirements may add conditions beyond a general qualification guideline. TSMC describes using Advanced Product Quality Planning (APQP), concurrent development disciplines, coordinated functions, release criteria, and deliverables to produce a process release specification.

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  2. Build qualification silicon and test structures

    Qualification uses dedicated structures and, where appropriate, functional technology qualification vehicles. JEDEC’s JEP001 series covers backend-of-line, transistor-level, and TQV testing. A TQV can use a functional design relevant to the technology’s intended applications, giving the evaluation a way to examine reliability in a more application-relevant context than isolated process structures alone.

  3. Screen for reliability weaknesses

    JEDEC describes Level 1 testing as a search for process reliability weaknesses, especially wear-out mechanisms. This stage is intended to find vulnerabilities in the technology before relying on it for a particular application; it is not itself a universal declaration that all resulting products are qualified.

  4. Evaluate reliability against application demands

    Level 2 testing evaluates reliability against projected or known application demands. It may use a functional TQV and include life testing. The exact tests, conditions, sample sizes, and acceptance basis depend on the technology and intended use rather than a single standard recipe.

  5. Check measurement and process-control readiness

    Qualification results are meaningful only when measurements and production controls can detect relevant variation. Samsung Foundry describes using statistical process control (SPC) to detect abnormal process variation, failure mode and effects analysis (FMEA) to identify potential failures and preventive actions, and measurement-system analysis to understand measurement uncertainty.

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  6. Review and document the evidence

    The foundry compares results with defined release criteria and records the outcome in qualification reports and process-release documentation. This lets the organization and customer assess what was tested, what requirements were applied, and whether the results support the intended release.

  7. Transfer the process and maintain its baseline

    After qualification, the technology is transferred into manufacturing under ongoing controls. TSMC describes manufacturing defense systems for detecting abnormal signals and responding promptly. Samsung describes a Process Change Control Board that requires implementation and verification plans for changes, helping ensure that alterations are assessed rather than silently changing the qualified baseline.

What a technology qualification vehicle does

A technology qualification vehicle is a test vehicle used to gather reliability evidence about a technology. Depending on its design, it can exercise structures or functions that represent aspects of the intended application. The point is not simply to demonstrate that a test structure works once; it is to provide evidence about how the technology behaves under relevant reliability evaluation.

JEDEC JEP001-3B distinguishes weakness screening from application-oriented evaluation: Level 1 looks for process reliability weaknesses, while Level 2 assesses reliability against projected or known application demands and may use a functional TQV. Neither level, by itself, defines a customer-independent pass/fail threshold.

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Process qualification and chip qualification are different

A qualified process supports confidence in the manufacturing technology, but does not automatically establish that every chip made with it will satisfy that chip’s requirements. Product qualification can involve the IC, package, their interaction, design, operating environment, and related software or firmware.

Aspect Process qualification Product qualification
Primary subject The manufacturing technology and its reliability evidence. A specific product and the requirements it must meet.
Typical evidence described by the sources Test structures, transistor-level and backend-of-line testing, TQVs, reliability evaluation, and process-release documentation. Product reliability testing or qualification by similarity justification. TI says its non-automotive products use JEDEC JESD47 methodologies and its automotive devices use AEC-Q100 methodology.
Why it cannot substitute for the other It does not prove that each design, package, or operating environment will meet product requirements. It evaluates a product against its own needs; it is distinct from qualifying the underlying manufacturing process.

IEC 63287-1:2021 is a separate guideline for IC product reliability qualification plans. Its publication description says sample sizes can be flexible and that Weibull analysis is one of several methods for determining sample size and test conditions. The standard excludes military- and space-related applications.

How to compare foundry qualification approaches

When evaluating alternative foundries or process options, compare the evidence and controls against the actual application rather than treating the word “qualified” as a complete specification.

  • Application fit: Ask which operating conditions and reliability demands the qualification represents.
  • Evidence scope: Establish whether the evidence includes relevant test structures, functional TQVs, wear-out evaluation, application-relevant tests, and product or package interactions where appropriate.
  • Acceptance basis: Clarify the agreed requirements, reporting, and release criteria. JEDEC JEP001-3B does not prescribe universal pass/fail values.
  • Controls after release: Ask how SPC, measurement assurance, corrective action, and process-change review will protect the released baseline.

What public information does not establish

Public descriptions of qualification methods do not establish one duration, yield-ramp target, sample size, or customer-independent release threshold for all foundries and processes. The applicable tests and criteria depend on the process, intended use, and foundry-customer agreement. A number or schedule should therefore be treated as specific to the stated technology and agreement, not as a general qualification rule.

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