Mapper’s Moscow MEMS factory opened on 3 July 2014 at Technopolis Moscow. It was built to supply electronic-optics components for Mapper’s multi-beam lithography systems; the initial planned capacity was enough lens elements for 20 machines a year. The operation later became a 100 mm-wafer MEMS producer and contract manufacturer. A 2026 industry report says it is owned by OKB Astron and can process up to 5,000 wafers annually.
When did Mapper’s Russian MEMS fab open?
The factory opened at Technopolis Moscow on 3 July 2014, after Rusnano announced in 2012 that it would invest about €40 million (then reported as about $50 million) in Mapper. Mapper invested 1 billion rubles, reported at the time as about $30 million, in the wafer fab. These are historical reported investment amounts, not current valuations. EE Times’ 2014 account describes the opening and planned production.
What did the plant make, and why did Mapper need it?
Mapper was developing maskless lithography: rather than using a conventional mask, its system divided an electron beam into multiple sub-beams. A MEMS-based projection system directed those beams to write a digital image on photoresist. Mapper worked with CEA-Leti and TSMC on the technology. The 2014 report linked the Moscow factory to the electronic optics needed for this system.
The planned component range ran from simple spacers to electronically controlled optical elements. The report described these as intended product classes and plans; it does not establish that each one reached volume production.
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| Planned component class | Role or complexity | Reported schedule |
|---|---|---|
| Spacers | Basic structural elements in the electronic-optics assembly; the report does not specify further technical detail. | Planned as part of the opening-era production program; a separate start date was not stated by EE Times. |
| Silicon electronic lenses | Focused and collimated electron beams. | Planned production was to begin in the third quarter of 2014, according to EE Times. |
| Elements with control-electrode electronics | More complex components incorporating electronics to control the beam. | Planned for a later production phase; a specific date was not stated by EE Times. |
Rusnano’s stated initial capacity was enough lens elements for 20 Mapper lithography machines per year. That is a component-capacity measure, not a claim that the plant would manufacture 20 complete lithography machines annually. EE Times attributes the figure to Rusnano.
How did the factory’s role change?
Technopolis Moscow’s official records describe Mapper LLC as a MEMS producer using 100 mm wafers and providing contract manufacturing. The site’s product categories include accelerometers, gyroscopes and diffraction gratings. This points to a broader manufacturing role than the original Mapper-specific electronic-optics supply plan, although the public records do not establish when each product line began or its production volume. Technopolis Moscow’s resident listing and its official site provide the company and product context.
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What is reported about the operation today?
A 12 September 2026 industry report says the facility has 1,500 m² of clean rooms, more than 30 equipment units and about 70 specialists, with capacity of up to 5,000 wafers per year. The same report says OKB Astron, part of Rostec’s Shvabe holding, has owned the operation since April 2022. These are figures and ownership details reported by 1.ru, not audited disclosures cited here; the wafer-capacity figure should not be read as actual annual output.
The reported 5,000-wafer capacity is not directly comparable to the original figure of enough lens elements for 20 lithography machines: one is wafer throughput, the other a planned component supply measure. Together, the accounts show a facility that began as a specialized part of Mapper’s lithography effort and is now described as a wider MEMS and contract-manufacturing operation.
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